DESIGN, MODELING AND SIMULATION OF NEMS BASED CAPACITIVE SENSOR FOR MEDICAL PRESSURE SENSING APPLICATIONS

DESIGN, MODELING AND SIMULATION OF NEMS BASED CAPACITIVE SENSOR FOR MEDICAL PRESSURE SENSING APPLICATIONS
Author(s):
Kirankumar B. Balavald, Bibi Ayesha Momin
Keywords:
NEMS, Capacitive Sensors, Pressure Sensors, Medical Applications
Abstract
For a quality of life, health plays an important role for our healthy life style. In hospitals to keep eye on patients of diseases like variation in Blood Pressure, changes in Respiration Rate and Asthma and many more, requires continues monitoring of their health activities. Pressure is a important parameter in human being, which can reveal health conditions. Therfore, it is very important to monitor patient’s pressure levels. There are lot of pressure sensors designed in past to monitor the pressure levels in humans. The work presented here, is a design on NEMS based Capacitive Pressure Sensor with high sensitivity and accuracy. The sensor is made up of two plates, a flexible Silicon and a fixed Steel and a dielectric Silicon dioxide (SiO2) .The designed senor is able to perform excellently over pressure ranges of up to 0 to 40KPa.
Article Details
Unique Paper ID: 156441 Publication Volume & Issue: Volume 9, Issue 3 Page(s): 620 - 625
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