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Theoretical Analysis of Micro-Piezo Motors

  • Unique Paper ID: 146343
  • Volume: 4
  • Issue: 12
  • PageNo: 256-266
  • Abstract:
  • Piezoelectric motors are recent type ofactuators in the field of MEMS (Micro Electro-Mechanical Systems). These motors work on the principle of inverse piezoelectric effect which have many other applications such as in micro sensors, actuators, resonators, filters, hydrophones etc. Functional and different drive techniques categorize these motors into three groups: resonance-drive (piezoelectric ultrasonic motors), inertia-drive, and piezo-walk-drive. In this paper, a brief summary of piezoelectric motors, with their classification, analysis is presented.
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  • ISSN: 2349-6002
  • Volume: 4
  • Issue: 12
  • PageNo: 256-266

Theoretical Analysis of Micro-Piezo Motors

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