Comparative study on simulation softwares in MEMs design :A survey

Comparative study on simulation softwares in MEMs design :A survey
Author(s):
Guruprasad B, Dr. Veena M G
Keywords:
MEMS, MEMS simulation tool, COMSOL software, coventovare software, Ansys, intellisuit software, FEA (finite element analysis tool).
Abstract
MEMS is a combination of mechanical and electrical components to create devices in micro scale range. The cost of production can be reduced by proper simulation there are many software tools are available for MEMS design the selection of tool depends on the customisation of the design and the range of geometry. This paper will summarise the technical features of all available software tool for MEMS design. The paper also contains the key points to be considered in the software while selecting as a tool for MEMS design and also details of the basic features available in all MEMS designing tools. It has been observed that if the design has particular physics and geometry the appropriate software must be selected. If we have the target of fabricating the device then software with virtual fabrication feature must be selected.
Article Details
Unique Paper ID: 153987 Publication Volume & Issue: Volume 8, Issue 9 Page(s): 369 - 374
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