BINARY OXIDE In2O3: MoO3 THIN FILMS: STUDY OF, STRUCTRAL, ELECTRICAL AND GAS SENSING PROPERTIES
Author(s):
Dr. Dhanwate S. V, Dr. Gosavi R.S, Dr. Kothawade N B.
Keywords:
Gas sensor, spray pyrolysis technique ,binary oxide thin films,In2O3, MoO3,Thin film, XRD, SEM and EDS.
Abstract
It is found that particular gases are not sensed by undopped gas sensors. For the improvement of the sensitivity and selectivity of sensor is most is necessary. The dopants or additives can be used to change the gas sensing characteristics. In the pure material A suitable catalyst or dopant is often added in small percentage to enhance the sensitivity and selectivity. Nanocomposite films of nanocrystalline or amorphous phase of a least two different materials can be developed and used as gas sensor. In2O3:MoO3 binary oxide thin films were prepared using spray pyrolysis technique on glass substrate at 4000C temperature and taking In2O3 as a dopant and MoO3 as a functional material .The precursor InCl3 and MoCl5 of concentrations 0.1N: 0.1N.
The In2O3:MoO3 binary oxide thin films were studied for the parameters like sensitivity, selectivity, response time, grain size, surface area, and stability of the gas sensors which were improved by addition of different dopants, and the results of the analysis are presented in the paper.
Article Details
Unique Paper ID: 157437
Publication Volume & Issue: Volume 9, Issue 7
Page(s): 177 - 181
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